椭偏仪在位表征电化学沉积的系统搭建（二十四）- 全波段沉积过程的准在位测试分析-不同时间所测试的光学

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椭偏仪在位表征电化学沉积的系统搭建（二十四）- 全波段沉积过程的准在位测试分析-不同时间所测试的光学常数

不同时间所测试的光学常数(n，k)

从图4-6(a，c)中看，随着时间的变化，光学常数n值发生变化。当沉积时间为180s的时候，在500-800nm的长波范围，其值从衬底(0s)时接近0增加到1.3，这也意味着新的物质增加，导致衬底的信息减少。在沉积时间增加到360s时，在410nm附近处现一个较明显的波包，同时在500-800nm区域出现一个波包，大约在700nm附近。当沉积时间增加到540s之后，n的值恢复到沉积180s附近。可以看出随着沉积的变化，沉积的CU₂O导致n值在360s的时候有额外的峰出现。

图4-6(b，d)中显示吸收系数k值随着时间的变化，与反射率R的趋势一致。在所测波长范围内的k值在沉积过程都有所降低，特别是在长波500-800nm的范围内zui为明显。当沉积时间为180s的时候，k的值大约从4.3降到1.5，在波长为300-500nm之间存在两个波包(330nm，400nm)。当沉积时间增加到360s时，在短波300-500nm的波包变得较明显(330nm，380nm)，整体的k值都有所增加。当沉积时间增加到540s时，k的值大小恢复到沉积180s时，但是在500-800nm范围出现两个波包(510nm，670nm)。到720s的时候，在500-800nm范围只有一个大的波包，并且k值较大。到900s和1080s时，在500-800nm范围时，又出现两个波包但是峰位有所变化。因此同样的，k值显示在360s比其它沉积时间有较大的吸收值。由于随着沉积时间的增加，所沉积的物质的物相可能发生变化以及厚度和表面粗糙度的变化。

新的物相会同时影响到折射率n和消光系数k，在图4-6(b，d)吸收系数中观察到在长波范围内(500-800nm)的波包变化但是在图4-6(a，c)中的折射率系数n却没有监测到，这意味着这个吸收系数的波包变化可能是沉积材料的厚度导致的。对于沉积时间为360s时，相对于其它沉积时间n值和k值都有很大的变化，这可能是360s时的物相较为特殊。由于物相包括新物质或者是结构，如颗粒尺寸，所以这可能是由于在360s时沉积的CU₂O成分或者是此时得到的颗粒尺寸或者结构有所不同，需要进一步验证。

图4-6不同沉积时间得到的椭偏数据图(a，c)n，(b，d)k

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