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非接触式薄层电阻测试仪

  • 非接触式薄层电阻测试仪
  • 非接触式薄层电阻测试仪
非接触测量方块电阻,高速,高精度,低备样需求

所属类别:材料分析设备 » 电涡流检测

所属品牌:

产品负责人:

姓名:谷工(Givin)

电话:185 1625 1863(微信同号)

邮箱:zonghao-gu@auniontech.com

非接触式薄层电阻测试仪


昊量光电新推出用于导电薄膜和薄金属层方块电阻测量的非接触式方阻测量仪EddyCus TF Series,这款非接触式方块电阻测量仪可以非接触式实时测量,对导电薄膜和金属方块电阻精确测量,表征已被隐藏和封装的导电层,并把测量数据保存和导出。


非接触式方块电阻测试仪主要测试对象:

  • 镀膜建筑玻璃,如LowE

  • 显示器,触摸屏和平板显示器

  • OLED和LED

  • 智能玻璃

  • 石墨烯层

  • 光伏晶圆和电池

  • 半导体晶片

  • 金属化层和晶圆金属化

  • 电池电极

  • 导电涂布纸和导电纺织品


非接触式单点方阻测试仪EddyCus TF Lab 2020SR


EddyCus TF Lab 2020SR是非接触式单点薄层电阻测量系统。该装置包含一个涡流传感器组,感应弱电流到导电薄膜和材料。试样中的感应电流产生与测量对象的片电阻相关的电磁场。电涡流技术不依赖于表面特征或形貌。此外,它不需要如已知的2或4点探针测试(2PP, 4PP)或霍尔效应或范德波测量一样进行任何形式的充分的样品接触或备样。它既不需要设置测试结构,也不受表面粗糙度或非导电封装或钝化层的影响。此外,测量不会对被测薄膜产生物理影响。涡流仪器不存在机械磨损,使用寿命长。它的独立性与接触质量和它的高速允许实现高重复性和准确性,有利于在研发和测试实验室的各种薄膜的系统质量保证。EddyCus工具可以由具有各种数据记录和导出功能的SURAGUS软件驱动,也可以由SURAGUS软件开发套件驱动的客户软件驱动。

软件和设备控制:

  • 非常用户友好的软件

  • 直观的触摸显示导航

  • 实时测量板材电阻和层厚

  • 软件辅助手动映射选项

  • 各种数据保存和导出选项


非接触式方块电阻测试仪产品规格表

Measurement technologyNon-contact eddy current sensor
substratesFoils, glass, wafer, etc.
Substrate area8 inch / 204 mm x 204 mm (open on three sides)
Max. sample thickness / sensor gap3 / 5 / 10 / 25 mm (defined by the thickest sample)
Thickness measurement range of metal films (e.g. copper)2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator))
Device dimensions (w/h/d)11.4” x 5.5” x 17.5” / 290 mm x 140 mm x 445 mm
Weight10 kg
Further available featuresSheet resistance measurement / metal thickness monitor
 VLSRLSRMSRHSRVHSR

6 decades are measurable by one sensor, but with slightly affected accuracy
Range [Ohm/sq]0.0001 – 0.10.1 – 100.1 – 10010 – 20001,000 – 200,000
Accuracy / Bias± 1%± 1 – 3%± 3 – 5%
Repeatability (2σ)< 0.3%< 0.5%< 0.3%
VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistanc

非接触式方阻成像仪EddyCus TF Map 2530SR




EddyCus TF Map 2530SR是一种非接触式薄层电阻映射系统。该设备配备了一个运动的涡流传感器,每次扫描可测量高达90000 (300 x 300)测量点的方块电阻。由于这种技术不需要与标本进行物理接触,该设备可以在飞行运动中进行测量。此外,它具有很高的准确性,因为它是独立于任何接触质量。样品中测量点的高密度确保了没有遗漏任何效果或缺陷。此外,综合分析功能支持生产和研发实验室中各种薄膜的系统质量保证。

产品规格:

Measurement technologyNon-contact eddy current sensor
SubstratesWafer, glass, foils etc.
Max. scanning area12 inch / 300 mm x 300 mm (larger upon request)
Edge effect correction / exclusion2 – 10 mm (depending on size, range, setup and requirements)
Max. sample thickness / sensor gap3 / 5 / 10 / 15 mm (defined by the thickest sample)
Thickness measurement of metal films (e.g. aluminum, copper)2 nm – 2 mm (in accordance with sheet resistance ())
Scanning pitch1 / 2.5 / 5 / 10 / 25 mm (other upon request)
Measurement points per time (square shaped samples)100 measurement points in 0.5 minutes
10,000 measurement points in 3 minutes
Scanning time8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch)
12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch)
Device dimensions (w/h/d)31.5” x 19.1” x 33.5” / 785 mm x 486 mm x 850 mm
Weight90 kg
Further available featuresMetal thickness imaging, anisotropy and sheet resistance sensor




 VLSRLSRMSRHSRVHSR

6 decades are measurable by one sensor, but with slightly affected accuracy
Range [Ohm/sq]0.0001 – 0.10.1 – 100.1 – 10010 – 2,0001,000 – 200,000
Accuracy / Bias± 1%± 1 – 3%± 3 – 5%
Repeatability (2σ)< 0.5%< 1%< 0.5%
VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance

便携式方块电阻测试仪

EddyCus TF便携式1010SR专用于工业环境中的接触片电阻测量。它使各种行业的手工质量保证成为可能。

Measurement technologyEddy current sensor
Measurement modeRealtime at constant distance  / contact
SubstratesGlass, foils etc.
Substrate sizesFlat samples > 150 mm x 150 mm (6 inch x 6 inch)
Curved editions are available for several applications (windshields etc.)
Measurement spot / high sensitivity zone40 mm diameter (1.6 inch)
PowerLithium ion battery up to 20 h
Sheet resistance range (five setups available)Type very low:    0.001 – 0.1 Ohm/sq
Type low:             0.04 – 0.1 Ohm/sq
Type standard:        0.3 – 30 Ohm/sq
Type high:               0.3 – 50 Ohm/sq
Type very high:       0.3 – 100 Ohm/sq
Thickness measurement of thin films (e.g. copper)Additional feature, available range is 5 nm – 500 µm (in accordance with sheet resistance)
Emissivity rangeAdditional feature, available range is 0.003 – 0.5
Accuracy (for planar solid surfaces, e.g. glass)0.001 – 50 Ohm/sq:  < 3%
50 – 100 Ohm/sq:     < 5%
DISPlay2.8 inch colored touch screen
Device dimensions (w/h/d)3.5” x 7” x 1.9” / 87 mm x 178 mm x 48 mm
Weight340 g
InterfacesBluetooth (optional) + data center


更多详情请联系昊量光电/欢迎直接联系昊量光电

关于昊量光电:

上海昊量光电设备有限公司是光电产品专业代理商,产品包括各类激光器、光电调制器、光学测量设备、光学元件等,涉及应用涵盖了材料加工、光通讯、生物医疗、科学研究、国防、量子光学、生物显微、物联传感、激光制造等;可为客户提供完整的设备安装,培训,硬件开发,软件开发,系统集成等服务。

您可以通过我们昊量光电的官方网站www.auniontech.com了解更多的产品信息,或直接来电咨询4006-888-532。

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产品标签:非接触式薄层电阻,日本Napson,Napson,Suragus,EddyCus,非接触方阻测试,非接触方阻测量,晶圆电阻测试,半导体非接触电阻率测试,SiC电阻率测试,非接触式电阻测量,非接触涡流法,非接触电阻仪,EC-80P,日本napson薄膜电阻检测仪,导电薄膜方块电阻无损检测设备,手动无损电阻测量仪,涡流法电阻测量仪,在线薄层电阻测量,金属膜厚测量仪导电薄膜,薄层电阻,四探针方阻测量,电涡流测量,四探针方阻测试仪