Rectangular grooves with period from 0.5 μm
Groove height up to 200 nm
Grating size up to 20×20 mm2
Substrate: Si, SiO2
Coatings:
thin films W, Al, Au etc.
multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.
substrate etching
period D=2 μm 50 W/Si bilayers (d=50 Å)
Grazing incidence phase Fresnel zone plates 1D or 2D x-ray focusing
Groove height up to 100 nm
Zone plate size:
1D focusing up to 50×50 mm2
2D focusing up to 20×0.2 mm2
Substrate: Si, SiO2
Coatings:
thin films W, Al, Au etc
substrate etching
Central and outermost zones of grazing incidence zone plate
产品标签：X射线光栅,X射线聚焦光栅,X射线衍射元件,菲涅尔波带片,X射线透镜
