桌面型主动隔振台-精密仪器和显微成像
台式 模块化
昊量光电新推出AFM、STM、台式扫描电镜、数字显微镜,SEM/TEM等的主动隔振解决方案,采样专利完全解耦的结构设计,有效隔离了来自地板的振动和由工具产生的振动,实现六自由度主动隔振,体积小质量轻负载能力强,易于集成到各类工作环境中,有效改善显微镜性能和图像质量。
ARIS系列主动隔振台特点:
六自由度
隔振频率0.5Hz-100Hz
可变阻尼
内置人工智能特性
可通过软件激活带宽
远程控制
内置实时频谱诊断和分析工具
ARIS主动隔振器内置振动器功能:
允许测试目标系统或设备在不同振动条件下的性能
调整不同的频率和振幅
再现真实环境条件,验证目标系统内部组件对振动的响应
内置的能力收集和分析数据
ARISTT系列规格:(原子力显微镜,生物显微镜,半导体等)
Device | ARISTT 75I | ARISTT 75 | ARISTT 75X | ARISTT 100 | ARISTT 150 | ARISTT 180 | ARISTT 200 |
---|---|---|---|---|---|---|---|
Dimensions (WxDxH) mm | 300x450x65 | 300x450x85 | 400x500x80 | 400x500x80 | 500x500x8 | 500x600x80 | 600x800x80 |
Load Capacity (kg) | 15-75 | 15-75 | 15-75 | 40-100 | 70-150 | 80-180 | 90-200 |
Actuator Force | ↕ 50N, ↔ 25N | ↕ 50N, ↔ 25N | ↕ 50N, ↔ 25N | ↕ 50N, ↔ 25N | ↕ 50N, ↔ 25N | ↕ 50N, ↔ 25N | ↕ 50N, ↔ 25N |
Active Isolation Range | 0.5-100Hz | 0.5-100Hz | 0.5-100Hz | 0.5-100Hz | 0.5-100Hz | 0.5-100Hz | 0.5-100Hz |
Degrees of Freedom | 4 degrees | 6 degrees | 6 degrees | 6 degrees | 6 degrees | 6 degrees | 6 degrees |
Vibration Isolation Performance | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz |
Settling time | <0.1 sec | <0.1 sec | <0.1 sec | <0.1 sec | <0.1 sec | <0.1 sec | <0.1 sec |
实时分析工具:内置实时2通道示波器,实时2通道频谱分析仪
实时性能调整:所有6个自由度的实时/远程访问自适应控制
工作电压:AC 80-260V/50-60Hz
架构:MVIS多层隔振结构
ARISTT系列规格:(SEM,TEM,FIB,半导体等)
Device | ARIS MD 300 | ARIS MD 500 | ARIS MD 1000 | ARIS MD Pro 300 | ARIS MD Pro 500 |
---|---|---|---|---|---|
Dimensions (WxDxH) mm | 270x230x75 | 270x230x75 | 370x230x75 | 230x230x75 | 230x230x75 |
Load Capacity (kg) | 100-300 per Isolator (Module) Number of Modules unlimited | 200-500 per Isolator (Module) Number of Modules unlimited | 500-1000 per Isolator (Module) Number of Modules unlimited | 100-300 per Isolator (Module) Number of Modules unlimited | 200-500 per Isolator (Module) Number of Modules unlimited |
Actuator Force | ↕ 80N, ↔ 40N | ↕ 80N, ↔ 40N | ↕ 80N, ↔ 40N | ||
Active Isolation Range | 0.5-100Hz | 0.5-100Hz | 0.5-100Hz | 0.5-100Hz | 0.5-100Hz |
Degrees of Freedom | All6 degree for System | All6 degree for System | All6 degree for System | All6 degree for System | All6 degree for System |
Vibration Isolation Performance | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz | -8db gain on 1Hz -20db gain on 2Hz |
Settling time | <0.1 sec | <0.1 sec | <0.1 sec | <0.1 sec | <0.1 sec |
实时分析工具:内置实时2通道示波器,实时2通道频谱分析仪
ARISTT桌面型主动隔振台应用:
ARISMD主动隔振台应用:
产品标签:桌面型隔震台,隔振台,桌面式隔振台,主动隔振台,隔震台,AFM主动隔振台,SPM主动隔振台,显微镜隔振台,原子力显微镜隔振台,扫描电镜隔振台,STM隔振台